| Parameter | Value |
| Resolution | 4.0 nm at 20kV(High Vacuum) 15 nm at 1kV(High Vacuum) 5.0 nm at 20kV (Low Vacuum) |
| Magnification | 6x-300,000x (photo mode) 16x-800,000x (on display) |
| Accelerating voltage | 0.3 to 20 kV |
| Specimen stage and positioning | 3-Axis Motorized Stage X : 0 – 50 mm Y : 0 – 40 mm Z : 5 to 33 mm Rotation : 360o Tilt : -15o to +90o |
| Electron gun | Pre-center cartridge filament (W/Th) |
| Detectors | Everhart Thornley Secondary Electron Detector High sensitivity semiconductor BSE detector Energy dispersive X-ray detector (EDS)* |
| Automatic Image adjustment | Auto brightness/contrast (ABCC) Auto focus control (AFC) Auto astigmatism correction & focus (ASF) Auto filament saturation (AFS) Auto beam alignment (ABA) Auto start |
| Image data saving | 640×480, 1280×960, 2560×1920, 5120×3840 pixels |
| Auxiliary Functions | Raster rotation Dynamic focus Image enhancement Data input (measurement between two points, measurement of angle, characters) Preset magnifcation Stage location navigation system (SEM Map) Beam marking Report creator |