The nano-focus at the diffraction endstation is created by a fixed KB-mirror system. The two mirrors with matching numerical aperture create a symmetric diffraction limited focus in the shape of two crossed one-dimensional sinc functions.
Beam size and intensity
The coherent properties, the size and the intensity of the focused beam depending on the used photon energy have been studied extensively by Björling et al. (2020) and by Johansson et al. (2021).
Hardware
Vertical (M1 – upstream) | Horizontal (M2 – downstream) | |
Mirror material | Single crystal silicon | Single crystal silicon |
Substrate shape | Elliptical cylinder | Elliptical cylinder |
Source to mirror center | 46.69 m | 46.82 m |
Mirror center to focal point | 0.31 m | 0.18 m |
Incidence angle at mirror center | 2.7 mrad | 2.5 mrad |
Reflection direction | Downward | Rightward |
Substrate size (L x W x H) | 150 x 30 x 50 mm | 100 x 30 x 50 mm |
Active optical surface (L W) | 140 x 8 mm | 90 x 8 mm |
Figure error (tangential) | <1.0 nm PV | <1.0 nm PV |
Micro roughness | <0.15 nm RMS | <0.15 nm RMS |
Sagittal radius | >10 km | >10 km |
Reflective coating | Pt, 40–50 nm | Pt, 40–50 nm |
Numerical aperture | 6.1 x 10^-4 | 6.2 x 10^-4 |
Beam divergence | 1.22 mrad | 1.25 mrad |
Geometrical demagnification | 150.6 | 260.1 |
Beam acceptance aperture | 378 um | 225 um |
The design parameters of the two KB mirrors have been published by Johansson et al. (2021). The high precision alignment procedure for the KB mirror system has been published by Kahnt et al. (2022).